[seminar] Seminar FO, Olivero

[hbuljan at phy.hr]

Poštovani kolege,

    podsjećam na današnji seminar.

Srdačan pozdrav,
Hrvoje Buljan

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SEMINAR FIZIČKOG ODSJEKA
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Vrijeme:   petak, 14. 03. 2008., 11:00 sati (točno)
Mjesto:    Fizički odsjek, Bijenička c. 32, predavaonica F25


     Fabrication of buried conductive channels in
             single crystal diamond with
         ion microbeam induced graphitization

               Dr. Paolo Olivero
        Laboratory for Ion Beam Interactions (LIBI),
     Ruđer Bošković Institute – Zagreb (visiting scientist) and
        Experimental Physics Department, University of Torino

   The process of ion-induced graphitization in diamond has been studied
since the 70s. In particular, the electrical conduction mechanisms
involved in the transition from the insulating diamond structure to a
conductive graphitic phase have been investigated in detail.
Remarkably, previous works were performed at relatively low energies
(20-320 keV), determining the formation of superficial graphitic paths.
Such conductive paths have been employed as IR emitters or contacts for
field emitters.
In the present work we report on a novel method for the fabrication of
three-dimensional buried graphitic micropaths in single crystal diamond
with the employment of focused MeV ions.
   The use of implantation masks with graded thickness at the micrometer
scale allows the formation of conductive channels which are embedded in
the insulating matrix at controllable depths. In particular, the
modulation of the channels depth allows the surface contacting of the
channel terminations without further fabrication stages. Channels
implanted with different sizes and ion fluences were characterized with
IV measurements. Scanning probe and optical profilometry were employed
to study the swelling effects associated with ion-induced damage.
   The application of buried conductive channels in diamond to devices of
technological interest will be discussed.


				Voditelj seminara FO
				Hrvoje Buljan, hbuljan at phy.hr

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